Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 31
INSTALLATION OF THE STP PUMP
3
3.4 How to install the STP pump
Install the STP pump to the inside of the vacuum equipment, as shown in Figure 17.
WARNING
An appropriate enclosure or a barrier that cannot be removed without using a tool
should be provided to prevent operators from accessing the connection cables
between the STP pump and its connectors.
WARNING
Follow the below when installing the STP pump, or connecting or disconnecting
cables. The primary power must be off (switch the MAIN POWER "OFF"). And isolate
(Lockout/Tagout) the vacuum equipment from the electrical energy source, water,
gas, and other energy sources. If you do not follow the above, it can cause an
accidental rotation of the STP pump, resulting in an accident, an electric shock, or
damage to equipment. Moreover, an accident caused by water leaks or gas leaks
can occur.
CAUTION
Use a supportive device such as a lifter when installing the STP pump to the vacuum equipment. If
you do not follow the above, it can hurt your back or cause injuries due to an accident such as the
STP pump falling.
A supportive device such as a lifter should withstand a load of five times or more than the weight of
the STP pump when installing the STP pump.
Figure 17 - Installation of the STP pump to the vacuum equipment
*1 The equipment and part within the parentheses must be prepared by the customer.
AC power cable
(Vacuum equipment)
*1
Inlet port
Inlet port flange
(Backing pump)
*1
(Dry pump, and other)
*1
Outlet port
(Vacuum valve)
*1
and (pipe)
*1
(To Main power)
*1
へ
TMS valve cable
(Serial cable)
*1
(Pipe)
*1
(To Purge device)
*1
(Inside of vacuum equipment)
(to Vacuum device control circuit)
*1
To iDT-002
iDT-002 cable
To TMS valve
See Section 3.9
Refer to the instruction manual of
the mounted communication interface.
Purge port

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English