WARNING
The STP pump's rotor spins at high speed. Therefore, any internal abnormality/error
can lead to personal injury or peripheral equipment damage by rotational torque
jumping.
The way to secure the STP pump will depend on the STP pump model and its usage. Secure the
STP pump to the vacuum equipment according to the procedure specified in this manual.
The STP pump is a component system when installed on semiconductor equipment. Check the
following when the STP pump is installed on semiconductor equipment.
• Confirm that the electric resistance value between the STP pump and vacuum equipment is set
to 0.1 Ω or less after securing the STP pump to the vacuum equipment.
The generated torque during a pump failure is called "Destructive torque". Design and secure the
vacuum equipment mounting the STP pump to withstand the destructive torque. Refer to Table 12 for
destructive torque and recommended securing bolt.
Refer to Table 11 for torque tightening the bolts.
Table 11 - Tightening torque of the bolt
Note: When using any securing method other than that specified in this manual, contact Edwards.
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