STP-iXA4507 series Turbomolecular Pump
4 OPERATION
4.1 Gas pumping, cooling and baking of the STP pump
The work in this manual must be done by personnel who understand its contents well.
4.1.1 Gas pumping
WARNING
Confirm the characteristics of gases to be used to prevent an accident. Refer to the
Safety Data Sheet (SDS) obtained from the gas supplier. Keep SDS and follow
safety advice from the gas suppliers.
WARNING
When using pyrophoric gas, keep SDS and the safety advice from the gas suppliers.
WARNING
When pumping gases, they may remain in the STP pump. Introduce a purge gas and
then exhaust all gases. Residual gases can cause an accident if/when the pump is
removed. Take measures according to SDS to prevent an accident when using toxic,
reactive, or combustible gases.
CAUTION
Chlorine or fluorine system gases can be used in the corrosion-resistant pumps. When you use
the following gases, contact Edwards:
• Gases including alkaline metals except for Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
The non-corrosion resistant pumps cannot use the above gases, including chlorine and fluorine
system gases.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.
Install the cables so that personnel are not exposed to the risk of tripping or falling.
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