Edwards STP-iXA4507 Series - Baking the STP Pump

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 53
OPERATION
4
4.3 Baking the STP pump
WARNING
The surfaces of the STP pump and its peripheral equipment will become extremely
hot. Never touch them with bare hands.
CAUTION
The TMS unit and the baking heater cannot be used together simultaneously.
Bake the vacuum equipment and STP pump to attain much less pressure and reduce the exhaust
time.
When baking them, always cool the STP pump to prevent overheating. Start baking after cooling is
started.
Set the temperature of the baking heater to 120 °C (248 °F) or less.
(The baking heater of the optional accessory is set to 110°C (230 °F) or less)
DO NOT introduce gases during baking to prevent overheating.
Run the STP pump during baking to exhaust the gas discharged from the vacuum equipment and the
inner wall of the STP pump.