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Edwards STP-iXA4507 Series - Operating the TMS Unit (for Use with the TMS Unit); Before Starting; StartingStopping; Setting the TMS Unit Function

Edwards STP-iXA4507 Series
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STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 59
OPERATION
4
4.9 Operating the TMS unit (for use with the TMS unit)
4.9.1 Before starting
Check the following items before starting:
1. Check that the TMS valve cable is securely connected to the "X3 VALVE" connector on the
control unit.
2. Check that the TMS valve and the cooling water pipe are securely connected.
4.9.2 Starting/Stopping
Power on the STP pump, and the TMS function starts automatically.
Power off the STP pump, and the TMS function stops automatically.
While the STP pump is in a power ON state, the TMS function operates regardless of the status of
the STP pump. When some errors occur, the TMS function is stopped.
4.9.3 Setting the TMS unit function
When an STP pump base temperature is lower than the set value, the TMS heater is turned "ON",
and the TMS valve is turned "OFF" to heat the STP pump.
When an STP pump base temperature is higher than the set value, the TMS heater is turned "OFF",
and the TMS valve is turned "ON" to cool the STP pump.

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