Edwards STP-iXA4507 Series - Operation Principle of the STP Pump

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 8
INTRODUCTION
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1.7 Operation principle of the STP pump
Turbomolecular pump (abbreviated to "STP pump" throughout this manual) is used for high vacuum
pumping. It is principally used for manufacturing and inspection equipment of semiconductors, flat
panels, and solar batteries.
The STP pump (Figure 8) is configured, so that rotor blade (1) and stator blade (2) are aligned
alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by
the high-speed rotation of the rotor.
The STP-iXA4507 series pump are magnetically-levitated turbomolecular pumps, each with the
following features:
1. Oil-free
2. Low vibration
3. High reliability
4. Compact size (Integrated control unit)
5. Temperature management system
1.
Rotor blade
5.
Axial sensor
9.
Motor
2.
Stator blade
6.
Axial electromagnet
10.
Rotor cup cover (option)
3.
Radial sensor
7.
Touch down bearing
11.
Rotor blade temperature warning
sensor
*1
(option)
4.
Radial electromagnet
8.
Control unit
*1 The rotor blade temperature warning sensor function can be added when ordering the product. Please contact us for
details.
Figure 8 - Cross sectional view of the STP pump
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11
6
5
6
7
7
9
3, 4
3, 4
1
2
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