STP-iXA4507 series Turbomolecular Pump
INSTALLATION OF THE STP PUMP
3 INSTALLATION OF THE STP PUMP
3.1 Precautions before installation
Installation, operation, and maintenance must only be executed by people who read through this
manual carefully and have the specific skills to install, operate, and maintain the STP pump.
3.1.1 Operating environment
WARNING
Confirm the characteristics of gases to be used to prevent an accident. Refer to the
Safety Data Sheet (SDS) obtained from the gas supplier. Keep SDS and follow
safety advice from the gas suppliers.
WARNING
Take measures according to SDS to prevent an accident when using toxic, reactive,
or combustible gases. Dilute the gas to be used with the inert gas controlled if
necessary. And take measures according to SDS to prevent an accident caused by
exhaust gas.
CAUTION
Chlorine or fluorine system gases can be used in the corrosion-resistant pumps. When you use
the following gases, contact Edwards:
• Gases including alkaline metals except for Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
The non-corrosion-resistant pumps cannot use with the above gases, including chlorine and
fluorine system gases.
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