STP-iXA4507 series Turbomolecular Pump
INSTALLATION OF THE STP PUMP
WARNING
The wipes used to clean the flange of the pump might become hazardous waste
depending upon the solvent (such as alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
WARNING
Follow the safety instructions and take appropriate precautions when disposing of
hazardous waste. If you do not follow the above, it can cause injury to people and
damage to equipment.
CAUTION
A splinter shield is attached to the inlet port flange to prevent foreign materials fall into the STP
pump. Always leave the splinter shield attached during operation.
CAUTION
ALWAYS install the STP pump under the condition that foreign materials cannot fall into it. Foreign
materials falling into the STP pump through the splinter shield may damage the product.
Check no dirt or oil spots on the inlet and outlet port flange seals before installing the STP pump to
the vacuum equipment.
Take the following measures for cleaning the seals:
• Clean off with pure gas.
• Wipe with proper solvent (such as alcohol).
The splinter shield cannot prevent foreign materials fall into the STP pump perfectly.
ALWAYS install the STP pump under the condition that foreign materials such as Si wafers or
samples are positioned above the STP pump cannot fall into it. It may result in product damage. If it
is not possible, always attach a shield plate with sufficient conductance above the STP pump.
Take care not to scratch the flange of the STP pump.
Check the flange for no scratches on the surface before installing the STP pump. If unsatisfactory,
contact Edwards.
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