Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 144
MAINTENANCE AND INSPECTION
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8
8.2 Cleaning
The method for cleaning the STP pump is as follows:
• Clean the outside of the STP pump with proper solvent as required. An alcohol solvent can be
used.
• Clean off with pure gas when the dust has accumulated in the connector.
• Clean the outside of the control unit with a dry wipe as required.
• When the dust has accumulated in the ventilation port, wipe it off or vacuum it with the cleaner.
Ensure that the dust must not enter the control unit.
• If the label of the STP pump has been damaged, contact Edwards.
The decontamination (overhaul) in the STP pump is executed in our Service office. When an overhaul
is needed, contact our Service office.
8.3 Inspecting the deposit
WARNING
Deposit may have accumulated inside the TMP depending upon the type of process
tool and process gases. If periodic overhauls are not conducted, the deposit inside
the TMP is excessively built up. It may cause a malfunction or the following failure
modes:
・ Rotor breakage due to contact of the rotor with the deposit
・ Damage to the process chamber and valve due to rotor debris
・ Damage to the cooling water lines due to shock from rotor breakage
In specific processes, the rotor contact with the deposit can lead to a chemical
reaction between the deposit and aluminium powder generated from the rotor. This
may result in abnormal combustion and sudden pressure increase.
It may damage not only the TMP but also the vacuum equipment where the TMP is
installed and the surroundings.
For devices in which deposit accumulates, conduct daily inspection and periodical
overhaul.
Leaving the STP pump without removing the deposit may cause the STP pump to
be corroded beyond it cannot be repaired. After removing the pump, contact our
service office and send the pump to the service office immediately.
Note: As stated in the Disclaimer, the costs of troubleshooting problems resulting from deposition
will be at your own charge even during the warranty period.
In a periodic inspection, inspect the inside of the outlet port and the pump interior for deposition
adhesion. Although the STP pump needs to inspect more often depending on the use conditions,
conduct a periodic inspection once every three to six months under normal conditions. If a deposit
has accumulated to some extent, an overhaul (cleaning) is required. Contact our Service office.

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English