STP-iXA4507 series Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
WARNING: Pump Run Time Over
Other Warning 1 (C/U Restart)
Other Warning 2 (FAN Warning)
Other Warning 3 (RTMP Higher)
Other Warning 4 (RTMP Lost)
Other Warning 6 (FAN Lifetime Over)
Other Failure 1 (RTMP Overheat)
Other Failure 2 (AMB Ctrl Lost)
Table 25 - Error message values (continued)
*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
*2 When the setting value of serial communication timeout is 0, the error 78 is disabled (not detected).