Edwards STP-iXA4507 Series - Configuration of the STP Pump with the TMS

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 47
INSTALLATION OF THE STP PUMP
3
3.9.5 Configuration of the STP pump with the TMS
Figure 27 shows the wiring and piping of the three-way valve type.
1.
STP pump
5.
TMS heater cable (with cover)
2.
TMS heater (with cover)
6.
TMS valve cable
3.
TMS valve
7.
X1 AC POWER connector
4.
Control unit
Figure 27 - Configuration of the STP pump with the TMS