STP-iXA4507 series Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
5.4 Command specifications
5.4.1 Command list
Reading the measured rotational speed
Sending commands of START, STOP, RESET (These
commands are valid only when it is sent to the serial port
set as the input operation port.)
Reading the errors being detected
Reading the pump operation mode and the errors being
detected
Reading the software version
Reading serial number, running time, and number of
launch times
Reading the setting values of the speed set point and the
TMS temperature
Reading the measured motor temperature
Reading the various settings
(Remote mode, TMS function, and emergency vent valve).
Reading the error records
Changing the speed set point
*1
Reading the speed set point
Reading the pump operation mode, the errors, and the
warnings being detected
Reading the TMS temperature, motor temperature, motor
current, measured rotational speed, and control unit
temperature
Reading each setting value of items
Changing each setting value of items
*1
Reading pump model and damage point
Reading the error record with detection time
Changing the optional function (Second speed option)
*1
Reading optional function (Second speed option, TMS
temperature)
Table 22 - Command list
*1 There is an endurance limit of setting changes (no more than 24 times per day for about ten years). If this limit is
exceeded, it not only may become impossible to change the setting but can also cause pump failure. Do not make setting
changes in excess of this endurance limit.