STP-iXA4507 series Turbomolecular Pump
2.3 Control unit
The values shown below are typical. They are not guaranteed.
Allowable input voltage fluctuation
1,600 max
(without TMS unit)
2,000 max
(with TMS unit)
Current Ampere Interrupting Capacity
(AIC)
3-phase d.c. brushless motor driver
Output frequency under normal operation
For other indication LEDs, refer to the separate
communication interface instruction manual.
For the communication interface, refer to the separate
instruction manual.
Electromagnetic bearing failure detection
STP pump overheat detection
Motor driver overload detection
STP pump overspeed detection
Control unit overheat detection