STP-iXA4507 series Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
Example:
When 3 errors have been detected in the past;
The number of "Error Record": 03
hex
= 3 errors
Error Record 1: 0F
hex
= 15 = Disturbance Xb
Error Record 2: 0D
hex
= 13 = Disturbance Xh
Error Record 3: 12
hex
= 18 = T.Cable Disconnected
Error Record 4 to 10: 00
hex
= No error recorded
5.4.12 SetSpeedSetPoint
Function: Changing the "Speed Set Point" value; this value can be changed from 13,860 to 27,720
rpm (231 to 462Hz). The threshold value of the illumination pattern of the "STATUS" LED is fixed. It
is not changed even if the setting value of the rotational speed is changed.
CAUTION
There is an endurance limit of setting changes (no more than 24 times per day for about ten years).
If this limit is exceeded, it not only may become impossible to change the setting but can also cause
pump failure. Do not make setting changes in excess of this endurance limit.
Speed Set Point
(Unit: Hz)
16-bits hexadecimal
coded ASCII
*1 When the value set to the parameter is larger than the upper limit, it is automatically set to the upper limit. When the value
set to the parameter is smaller than the lower limit, it is automatically set to the lower limit.