STP-iXA4507 series Turbomolecular Pump
MAINTENANCE AND INSPECTION
8.4 Maintenance
8.4.1 Recommended overhaul intervals
If the STP pump has been used for a long time, accumulation of a deposit and deterioration/failure of
the parts may cause the pump to stop running or fail.
To efficiently and safely use the STP pump, periodically conduct an overhaul.
By referring to the overhaul intervals based on the pump conditions of use as shown in the table
below, develop an overhaul plan.
Recommended overhaul
interval
When a deposit has
accumulated
Processes making many depositions
in the pump will require a more
frequent overhaul.
When no deposit has
accumulated, but corrosive
gas has been used
The overhaul interval needs to be
individually set if the parts are
severely deteriorated due to
corrosive gas.
When no deposit has
accumulated and no corrosive
gas has been used
Note: When "First Damage Limit" warning or "Second Damage Limit" warning is detected, it is
essential to replace the touch down bearings regardless of the recommended overhaul
intervals. Warning detection is indicated by flashing of "STATUS" LED (3 flashes in orange),
a message on the display unit iDT-002 (optional accessory) or the STP-Link (optional
accessory).
8.4.2 Standard replacement parts
When overhauling the STP pump, upper and lower touch down bearings and O-rings will be replaced
as standard replacement parts.
Note: When the STP pump and STP control unit detects a warning, it is essential to have the touch
down bearings replaced regardless of the recommended overhaul intervals. Refer to the
Instruction Manual for each model for details of warning detection.