STP-iXA4507 series Turbomolecular Pump
MAINTENANCE AND INSPECTION
8 MAINTENANCE AND INSPECTION
Installation, operation, and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform the STP pump installation, operation, and
maintenance. Confirm that no power is applied to the STP pump (refer to SEMI S2 Section 13.2 -
type 1).
8.1 Maintenance and inspection
WARNING
When performing maintenance and inspections of the STP pump, exhaust gases
inside the STP pump thoroughly. Residual gases may cause an accident when
removing the STP pump. To prevent an accident, confirm the characteristics of
gases to be used. Refer to the Safety Data Sheet (SDS) you obtain from the gas
supplier. Wear personal protective clothing if necessary.
WARNING
Before carrying out any maintenance or inspections on the STP pump, confirm that
the STP pump has stopped, power off the primary power (switch the MAIN POWER
to "OFF") and isolate (Lockout/Tagout) the electrical energy source, water, gas, and
other energy sources from the vacuum equipment. Otherwise, it may result in an
inadvertent rotation of the STP pump, resulting in an accident, an electric shock, or
damage to equipment. Moreover, an accident caused by water or gas leaks may
occur.
WARNING
The wipes used for cleaning and decontamination might become hazardous waste
depending upon the solvent (such as alcohol). Dispose of the contaminated wipes
appropriately according to the regulations of each national and/or local government.
CAUTION
DO NOT touch any place other than those specified when performing maintenance or inspecting
the pump. And NEVER open any panel because it could cause shock, malfunction, or short circuit.
Power OFF the peripheral equipment before performing maintenance and inspections.
Only Edwards will repair, overhaul, and replace the maintenance parts. Contact our Service office.
To Next Page
Loading...
Need help?
General
