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Edwards STP-iXA4507 Series User Manual

Edwards STP-iXA4507 Series
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STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 55
OPERATION
4
4.4.1 Confirmation before starting
After completing the installation, piping, leakage test of the STP pump, and wiring of the power
cables, the STP pump is ready to start. Confirm the below before the STP pump starts.
1. Ensure the STP pump is installed correctly (refer to Section 3).
2. Ensure the correct supply voltage is applied.
3. Ensure all cables are securely connected and locked.
4.4.2 Confirmation of vacuum system
1. Starting backing pump
Start the backing pump before or simultaneously with the start of the STP pump. Open the vacuum
valve at the outlet port flange side after starting the backing pump.
Note: DO NOT open the vacuum valve without operating the backing pump. It may cause a reverse
flow of oil, which can contaminate the inside of the STP pump, depending upon the backing
pump's type.
Note: DO NOT frequently start/stop operations. Otherwise, it can cause the STP pump to overheat.
2. Stop backing pump
CAUTION
DO NOT stop the backing pump without closing the vacuum valve. It can cause a reverse flow of
atmospheric air into the STP pump, resulting in a malfunction depending upon the backing pump's
type.
Close the vacuum valve at the outlet port flange side just before or after stopping the STP pump.
After closing the valve, then stop the backing pump.
Note: DO NOT stop the backing pump without closing the vacuum valve. It may cause a reverse
flow of oil, which can contaminate the inside of the pump, depending upon the backing
pump's type.

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Edwards STP-iXA4507 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iXA4507 Series
CategoryWater Pump
LanguageEnglish

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