Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 72
SERIAL COMMUNICATION PROTOCOL
PAG
E
72
5
5.3.4 Query command (in the RS232/RS485 single point connection)
A query command is used to read the pump operation state and setting values. The first character of
the query command in the RS232/RS485 single point connection is "?" (HEX code "3F"), and the
subsequent characters are ASCII characters corresponding to the respective function code and
parameter.
?
CHR
C
1
C
2
C
n
CHR: Function code character, C
1
to C
n
: Parameter
The parameter (C
1
to C
n
) is a 16 bit signed hexadecimal value coded ASCII text. When a message
(the space character, the function code, and the parameter) exceeds 255 characters, input "?" and
CHR to only the top of the transmission blocks (the first transmission block of the transmission
frame). It is unnecessary to input them into the 2nd and the subsequent transmission blocks.
The SIM returns the acknowledgement response character "#" when correctly processing the query
command. If not, the SIM returns the non-acknowledgement response character "!" and 3 characters
of the non-acknowledgement code are added to "!".
Transmission frame when data is transmitted with one block and returned with two blocks:
Designate the query command on a PC first.
<- Less than 256 chr. ->
PC->SIM
Stx
0
0
1
?
CHR
C
1
C
n
Etx
LRC
SIM->PC
Ack or Nak
The parameter characters are less than 254 characters (n< 254) when the message is less than 256
characters.
Then if the preceding SIM->PC character is "Ack", the instructed query command is executed, and
the SIM returns the following response (1st block).
PC->SIM
Ack or Nak
SIM->PC
Stx
0
0
1
Sp
CHR
C
1
C
253
Etb
LRC
And then, if "Ack" is sent by the PC->SIM character as a response (1st block) to the SIM, the SIM
returns the following response (2nd block).
PC->SIM
Ack or Nak
SIM->PC
Stx
0
0
2
C
254
C
n
Etx
LRC
The PC transmits "Ack" or "Nak"; then transmits the next command if necessary.

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English

Summary

Technical Data

STP Pump Specifications

Gas Flow Rates and Cooling Conditions

Provides data on maximum gas flow rates and water cooling requirements.

Installation of the STP Pump

Installation Procedures and Connections

Guides on how to install, connect cables, piping, and specific units like TMS.

Piping and Connections

Details vacuum piping methods and connecting purge and cooling ports.

TMS Unit and Baking Heater

Semiconductor Equipment Integration

Serial Communication Protocol

Connection and Setup Procedures

Details signal connections, RS485 setup, communication parameters, and ports.

Protocol and Transmission Standards

Explains protocol specifications, transmission frames, error control, and data formats.

Command Specifications and List

Lists available commands for pump operation, settings, and reading data.

Safety Functions

Safety Function Overview

Explains safety functions for detecting abnormalities/errors and response mechanisms.

Warning Functions and Settings

Troubleshooting Safety Issues

Provides guidance on troubleshooting failures indicated by LEDs or errors.

Maintenance and Inspection

Cleaning and Deposit Inspection

Overhaul and Replacement Intervals