Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 141
SAFETY FUNCTIONS
7
7.6.2 Indication of "STATUS" LED (green and red alternately)
If an abnormality/error is detected by self-test during the power ON operation, the "STATUS" LED
flashes in green and red alternately. This is the indication of the STP pump or control unit failure.
Contact our Service Office.
7.6.3 No Indication of the "STATUS" LED (red)
No.
Symptom
Probable cause
Countermeasures
Referred
Section
1
"STATUS" LED
does not illuminate.
Incorrect connection of
power cable
Connect the power cable correctly.
3.4.5
3.4.6
Abnormal power voltage
Set the input voltage to the rated
voltage ±10 %.
2.3
Power failure
Check whether or not a power failure
has occurred.
7.1.1
2
Green flashing
pattern of the
"STATUS" LED
does not change
after performing the
start operation.
Failure of the "Input
Operation Port" setting.
Set the input operation port correctly.
4.7
5.2.4
3
Insufficient ultimate
pressure.
Failure of the backing-
pump.
Check the capacity and starting state
(use a backing-pump having more
capacity that we specified).
2.1
4.4
Leakage of the piping
system.
Check the piping system for leakage.
3.5
Residual molecules.
If the main composition is H
2
or H
2
O,
perform baking; if it is other gases,
clean the inside of the vacuum
equipment (If gases remain inside the
STP pump, contact our Service office
when it is needed to be cleaned).
3.8
4.3
4
Abnormal noise is
generated while the
pump is rotating
External vibration or
impact
Remove external vibration so as not to
transmit it to the STP pump.
3.1.1
Table 44 - Troubleshooting with no indication of the "STATUS" LED

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English