STP-iXA4507 series Turbomolecular Pump
INSTALLATION OF THE STP PUMP
3.1.3 Bench
A bench must be prepared by the customer to secure the STP pump. The shape and size of the
bench differ depending on the equipment to install the STP pump.
WARNING
Obey the safety instructions given below and take note of appropriate precautions.
If you do not, you can cause injury to people and damage to equipment.
WARNING
The STP pump is provided with a high-speed rotor. Any internal abnormality/error
may result in a jump in rotational torque leading to personal injury or peripheral
equipment damage.
WARNING
Design and secure the bench for the STP pump to withstand the maximum torque
generated due to the occurrence of an abnormality/error. Refer to Section 3.4.3,
"Secure the STP pump" for abnormal torque.
CAUTION
Secure the customer-prepared bench and the vacuum equipment on the floor or the equipment to
install the STP pump. NEVER move them while the STP pump is in operation.
Confirm the dimensions of the external appearance of the STP pump when designing the bench.
The bolt may not be able to be inserted from the lower side of the inlet port according to the shape of
the inlet port flange.
Note: When the external appearance of the STP pump is not in the manual, contact Edwards.
3.1.4 Insulation test
DO NOT perform an insulation test on the control unit. When performing the insulation test on your
equipment, ensure that you disconnect the control unit from your equipment. Ensure that the test
voltage will be not applied to the control unit.
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