Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 22
INSTALLATION OF THE STP PUMP
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The STP pump should be installed in an area that meets the following requirements:
Ambient temperature
0 to 40 °C (32 to 104 °F)
Ambient relative humidity
30 to 95% (no dew condensing)
Environment
• An area that is free of externally applied mechanical
shock.
• A place that is free of a heat source (Keep clear from the
heat source or attach a thermal shield plate).
• A place that is free of a strong magnetic field (Range: up
to 15 mT (150 G) in the axial direction, and up to 3 mT
(30 G) in the radial direction).
• A place that is free of a strong electric field.
• A place that is free of radiation exposure.
• No high voltage discharge (more than 500 V) (If more
than 500 V is discharged, contact Edwards).
• A place at an altitude of 2,000 m or less.
• A place indoors.
• Others: An area that is free of exposure to direct
sunlight, high humidity, dust, salty air, dripping water,
explosive or flammable gas, corrosive gas, excessive
vibration, and sources of electric noise.
STP pump installation
equipment conditions
Avoid a situation where foreign materials can fall into the
STP pump (Ex. Si wafers or samples positioned above the
STP pump). (Place a shield plate to prevent foreign materials
from falling into the STP pump, and use the shield plate with
good conductance).
Install the STP pump so that the inlet flange of the STP pump
not to be exposed to heat sources. (Install the heat shield
plate to avoid getting radiation heat)
Good example:
Heat shield plate
Bad example:
None
Table 7 - Environmental requirements for installation

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English