Edwards STP-iXA4507 Series

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STP-iXA4507 series Turbomolecular Pump

MT-91E-001-0

Page 60

OPERATION

PAG

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Table of Contents5
Introduction11
Scope and Definitions11
Electromagnetic Compatibility12
Limited Warranty12
Item Warranted12
Disclaimer13
Spare Parts13
Precautions for Safe Operation of the STP Pump14
Usable Gases14
Maintenance and Inspection Precautions15
Labels15
Warning Label of STP Pump Installation and Caution Label for Heavy Product15
Caution Label of Heater Removing Prohibition and Warning Label for Hot Surface16
Caution Label for the High Voltage Devices16
Label for the Rotational Direction16
Notice Label Urging to Use Water-Cooling17
Label Related to Connecting the Water-Cooling Lines17
Warning Label of Urging Overhaul the Pump17
Operation Principle of the STP Pump18
STP Pump Specification20
Technical Data23
STP Pump Specifications23
Maximum Gas Flow-Rate25
STP-Ixa4507C/CV/Cv325
Maximum Gas Flow-Rate (STP-Ixa4507C)25
Maximum Gas Flow-Rate (STP-Ixa4507Cv)25
Maximum Gas Flow-Rate (STP-Ixa4507Cv3)25
STP-Ixa4507B/Bv/Bv326
Maximum Gas Flow-Rate (STP-Ixa4507B)26
Maximum Gas Flow-Rate (STP-Ixa4507Bv)26
Maximum Gas Flow-Rate (STP-Ixa4507Bv3)26
Water Cooling Use Condition27
Control Unit28
External Appearance of the STP Pump29
External Appearance of STP-Ixa4507 Series29
Label Affixing Positions30
Installation of the Stp Pump31
Precautions before Installation31
Operating Environment31
Installation Area33
Space Around the STP Pump33
Bench34
Insulation Test34
Unpacking35
Unpacking the STP Pump35
Name and Function of each Part38
Name and Function of the Pump38
Configuration of the STP Pump38
Control Unit (Front Panel)38
Pump Functions38
Name and Function of the Control Unit39
Control Unit Front Panel Functions40
How to Install the STP Pump41
Installation of the STP Pump to the Vacuum Equipment41
Cleaning the Seal42
STP Pump Installation Positions43
Positions of the Outlet Port on the Horizontally43
Secure the STP Pump44
Destructive Torque and Recommended Securing Bolt for Inlet Port Flange45
Screw Holes for Securing the Base of the Control Unit47
Screw Holes for Securing the Control Unit Base47
Power Cables48
Power Cable48
How to Connect the Power Cable50
Precautions for Vacuum Piping51
Vacuum Piping Method51
Connecting the Purge Port52
Connecting the Water Cooling Pipes53
Positions of the Cooling Water Port53
Attaching a Baking Heater54
TMS Unit55
TMS Unit Specification55
TMS Heater56
Connecting the TMS Heater Cable56
TMS Valve56
Configuration of the STP Pump with the TMS57
Connecting the Pump and TMS Valve58
Connecting to Semiconductor Equipment59
3.10.1 Connecting to Power59
Emergency off Circuit (EMO Circuit)59
Operation61
Gas Pumping, Cooling and Baking of the STP Pump61
Gas Pumping61
How to Introduce a Purge Gas62
Cooling the STP Pump62
Water-Cooling Method62
Baking the STP Pump63
Before Starting the STP Pump64
Example of Cable Installation in Metallic Duct64
Confirmation before Starting65
Confirmation of Vacuum System65
Powering ON/OFF66
Powering on66
Powering off66
Pump Operation66
Input Operation Port Setting66
X5 STP-LINK Socket66
Status" Led67
Second Speed Option68
Second Speed Function68
Operating the TMS Unit (for Use with the TMS Unit)69
Before Starting69
Starting/Stopping69
Setting the TMS Unit Function69
Serial Communication Protocol71
Introduction71
Serial Port71
Connection and Setting up72
Signal Connection72
X2 Pin Assign72
Connecting the RS48573
Communication Parameter Setting74
Input Operation Port Setting74
Communication Parameters74
Input Operation Port74
Serial Communication Timeout Setting75
Serial Communication Time out Setting75
Recommended Items about Communication Cable Installation76
Grounding Example (both Ends Grounding)76
Grounding Example (Single-Point Grounding)76
Example of Cable Installation in Metallic Duct77
Protocol Specifications79
General Description79
Standard Transmission Frame80
Control Command80
(In the RS232/RS485 Single Point Connection)80
Query Command82
(In the RS232/RS485 Single Point Connection)82
Transmission Data Format83
Frame Control (Checksum)83
Error Control83
Transmission Frame in RS485 Multi-Point Connection83
Control Command in RS485 Multi-Point Connection85
5.3.10 Query Command in RS485 Multi-Point Connection86
5.3.11 Broadcasting Command in RS485 Multi-Point Connection87
Pump Operation Commands87
5.3.12 Application Note88
Example of Command Sending During Answer Data Reply89
Example of the Communication Cycle Process90
Example of the Command Sending Process91
Command Specifications92
Command List92
Readmeas93
Command93
Readfailmess94
Pump Operation Commands94
Error Message Values96
Error Message Values (Continued)97
Readmodfonct98
Pump Operation Mode98
Readversion100
Readcounters101
Readsetpoint102
Readmotortemp102
5.4.10 Readstatus103
5.4.11 Readevents104
Remote Mode104
5.4.12 Setspeedsetpoint105
5.4.13 Readspeedsetpoint106
5.4.14 Readmodfonctwithwarning107
5.4.15 Readmeasvalue110
5.4.16 Readoptionfunc112
5.4.17 Setoptionfunc115
5.4.18 Readcondition117
5.4.19 Readeventswithtime119
5.4.20 Setoptions124
Second Speed Function Setting124
Option Function Number and Parameter List124
Second Speed Selection125
5.4.21 Readoptions126
Second Speed Function Setting126
Option Function Number and Parameter List126
Second Speed Selection127
TMS Temperature128
Stp-Link and Display Unit131
STP-Link131
Display Unit131
Safety Functions133
Power Failure133
STATUS LED and X4 REMOTE Output Signals at Power Failure133
Operation after a Power Recovery134
Abnormal State of Magnetic Bearing (Disturbance)134
Excessive Vibration (Disturbance)134
Motor Driver Overload (DRV Overload)135
Overheating Inside the STP Pump (MOTOR Overheat)135
Overheating Inside the Control Unit (CNT Overheat)135
Overspeed135
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)135
Safety Feature of the Rotor Blade Temperature Warning Sensor (Option)136
WARNING" Function137
WARNING Function137
Contents of WARNING Function138
First Damage Limit138
Second Damage Limit138
Pump Run Time over138
Pump Overload139
Imbalance139
Other Warning140
WARNING Function Setting141
Default Setting of WARNING Function141
Factory Setting and Variable Range141
Troubleshooting Immediately after Failure Occurs142
After Power Failure142
After Other Abnormality/Error142
Troubleshooting143
Indication of "STATUS" LED (Red Flash)143
Indication of "STATUS" LED (Green and Red Alternately)151
No Indication of the "STATUS" LED (Red)151
Troubleshooting with no Indication of the "STATUS" LED151
Maintenance and Inspection153
Cleaning154
Inspecting the Deposit154
Maintenance156
Recommended Overhaul Intervals156
Standard Replacement Parts156
Recommended Maintenance Intervals for Main Parts157
Transporting for Repair or Overhaul158
Storage and Disposal159
Storage of the STP Pump159
Disposal159
Service, Spares and Accessories161
Introduction161
Service161
Spares161
Accessories162

Edwards STP-iXA4507 Series - Page 70

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