Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 139
SAFETY FUNCTIONS
7
Referred
Section
7.1.10
5.2
2.2.3 3.9.6
Table
42 - Error List
(continued)
Countermeasures
Contact
our Service office.
Contact
our Service office.
1. Check the conditions of the
pump.
2. Plan for
STP pump overhaul.
3. Apply the flow rate described in
the STP pump specifications.
1. Send a communication
command periodically at intervals of less than
setting
value.
2. Check the communication
cable.
3. Contact
our Service office.
Contact
our Service
office.
Overhaul is needed
.
Contact
our Service office.
1. Connect the electromagnetic
cooling water valve correctly. Check the volume of water and water temperature.
2. Contact
our Service office.
Probable causes
Failure of the
control unit.
Failure of the
control unit.
1. Overload 2. Excess product deposition 3. Inappropriate
purge gas flow
rate
1. Insufficient user application
setting
.
2. Disconnection
or break
of the
communication cable.
3. Failure of the
control unit.
Failure of the
control unit.
Frequency of "Disturbance"
or
"Power
Failure" error
.
1. Cooling failure of
TMS unit
.
2. Failure of
the TMS unit.
Occurrence condition
Power supply circuit failure
in control unit
Failure of record in memory
Decelerate and stop
Communication failure of the input operation port during
acceleration
and normal operation
Abnormal rotatinal speed detection
Damage point excees setting value
TMS temperature control error (when the TMS unit
detection
temperature becomes higher than
the setting
value by 10°C (
18 ºF) or
more.
)
Pump operation
Decelerat
e and stop
Decelerat
e and stop
Rotor blade overheating
Decelerat
e and stop
Decelerat
e and stop
Decelerat
e and stop
Decelerat
e and stop
Message
Power Supply Fail
Record
Failure
RTMP Overheat
Serial Com. Fail
Speed Pulse Lost
Start Not Allowed
TMS Higher Temp

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English