STP-iXA4507 series Turbomolecular Pump
Table
41 - Error List
(continued)
1. Check whether or not a power
failure has occurred.
2. Connect the power cable
correctly.
3. Replace the power cable.
4. Set the
rated
voltage ±
10 %.
1. Check the volume of water
and
water temperature with water
cooling unit.
In order to recover,
turn off the power (switch
"OFF"), and then switch "ON"
after sufficient cooling of the
control
unit.
(Isolate input power supply 3
minutes or more
.)
2. Contact
our Service office.
2. Incorrect connection of the
power cable.
3. Failure of
the power cable.
4. Failure of the power supply
vlotage.
1. Insufficient cooling of the
control unit
.
2. Failure of
the control unit.
Insufficient power
supply
Overheat inside the
control unit
.