Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 137
SAFETY FUNCTIONS
7
Referred
Section
4.3
4.1.1 4.3
4.4.2
4.4
Table
40 - Error List
(continued)
Countermeasures
1. Set the temperature of the
baking heater to 120
°C
(248 °F) or less.
2. At the time of baking or gas
pumping,
always cool the STP
pump.
3. Check the piping system for
leakage.
4. Repetitious start/stop
operations may cause the STP pump to overheat.
5. Replace the air
-cooling fan.
Contact
our Service office.
Contact
our Service office.
Probable causes
1. Overheating during baking
.
2. Insufficient cooling
.
3. Leakage of the vacuum piping
system
.
4. Repetiti
ve start/stop operations
.
5. Failure of
the air
-cooling fan.
Failure of the
control unit.
Occurrence condition
Overheating inside the STP pump
Rotaional speed exceeds rated speed
Pump operation
Decelerat
e and stop
Decelerat
e and stop
Message
MOTOR Overheat
Overspeed 1, 2, 3, 4

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English