Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 136
SAFETY FUNCTIONS
PAG
E
136
7
Referred
Section
2.1
2.1
4.4.2
2.1
*1 The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the
STP pump.
*2 The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Table
39 - Error List
(continued)
Countermeasures
1. Use the maximum working
pressure or less.
2. Use the allowable backing
pressure or less.
3. Check the vacuum piping
system for leakage.
4. Check th
e backing
-pump for its
capacity and START state
.
(use a
backing
-pump with the
recommended capacity or more)
Contact
our Service office.
Contact
our Service office.
Contact
our Service office.
Probable causes
1. High pressure at the inlet port
.
2. High pressure at the outlet port
.
3. Leakage of the piping system
.
4. Failure of the
backing
-pump.
Failure of the
control unit.
1. Failure of the STP
pump.
2. Failure of the
control unit.
Disconnection of the
motor
temperature
sensor
.
Occurrence condition
Acceleration
state
continues for approx.
30
minutes
Motor driver over voltage
Excessive magnetic bearing electric current continues for 30 sec.
Abnormal
motor
temperature
detection
Pump operation
Decelerat
e and stop
Free run
*1
Touch down.
*2
Decelerat
e and stop
Message
DRV Overload
DRV Ove
rvoltage
Inordinate Current
M_Temp Lost

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English