Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 135
SAFETY FUNCTIONS
7
Referred
Section
3.1.1 3.4
3.5
3.4
*1 The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the
STP pump.
Table
38 - Error List
(continued)
Countermeasures
1. Remove external vibration so
as not to transmit it to the STP pump.
2. Check the vacuum piping.
3. Install the STP pump in a way
that no foreign materials fall into the STP pump.
4. Perform roughing vacuum
through bypass root.
Contact
our Service office.
Contact
our Service office.
1. Perform
a re-start operation
after resetting.
2. Contact
our Service office.
Contact Service office.
Contact
our Service office.
Probable causes
Excessive vibration applied externally to the STP pump:
1. External vibration/impact
.
2. Atmospheric air flows
into the
STP pump
.
3. Foreign materials fall into the
STP pump
.
4. Sudden pressure change at
the
start of
roughing vacuum by
backing
-pump.
Abnormal magnetic bearing:
1. Control circuit error.
2. Disconnection of the internal
wiring
.
Failure of the
control unit.
1. Malfunction by external noise
.
2. Failure of the
control unit.
1. Short-circuit or ground fault
in
the motor
winding
.
2. Failure of the
control unit.
Occurrence condition
Excessive
imbalance
Communication
failure
with the motor control board
Communication
failure
with the motor control board
Motor driver over current
Pump operation
Decelerat
e and stop
Decelerat
e and stop
Decelerat
e and stop
Free run
*1
Message
Disturbance X_H Disturbance Y_H
Disturbance X_B Disturbance Y_B Disturbance Z
DRV Com. Failure
Driver
Failure
DRV Overcurrent

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English