STP-iXA4507 series Turbomolecular Pump
*1 The driver output stops and the rotor continue rotating by inertia.
It may take several hours to stop.
To stop the STP pump quickly, close the vacuum valve at the outlet port flange and introduce gas from the purge port into the
STP pump.
Table
37 - Error List
Check the vacuum piping system
for leakage.
Check the exhaust sequence.
Turn "OFF" the switch to stop the
pump, and then turn "ON" the
switch again to recover.
Contact
our Service office.
1. Perform
a re-start operation
after resetting.
2. Contact
our Service office.
Contact
our Service office.
Contact
our Service office.
1. Set the temperature of the
baking heater to 120
°C or less.
2. At the time of baking or gas
pumping,
always cool the STP
pump.
3. Check the piping system for
leakage.
4. Repetitious start/stop
operations may cause the STP
pump to overheat.
5. Replace the air
-cooling fan.
Contact
our Service office.
Atmospheric air flows
into the STP
pump.
Failure of the
control unit.
1. Malfunction by external noise
.
2. Failure of the
control unit.
Failure of the
control unit.
1. Failure of the STP
pump.
2. Failure of the
control unit.
1. Overheating during baking
.
3. Leakage of the vacuum piping
system
.
4. Repetiti
ve start/stop operations
.
5. Failure of
the air
-cooling fan.
Rotational speed
increases
in brake or
Levitation state
The rotation
does not
stop after 20 min. into
brake state
Accelerate up to
2,000
rpm or less
Communication failure
in
the control unit
Rotor control signal
disconnection
Overheating inside the
control unit
Free run, or d
ecelerat
e
and stop
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