*2 Maximum backing pressure is the pressure when the working pressure rises suddenly without flowing gas.
*3 Critical operating backing pressure is the pressure that allows continuous operation without flowing gas.
*4 If the purge gas flow rate is out of specification, the rotor blade temperature warning sensor may not function properly.
*5 Always introduce purge gas when process gas is present inside the pump to prevent product deposition on the magnetic
bearing components. Adhesion of reactive products to the stator column can scratch or lock the rotor. Be sure to
introduce the N
2
purge gas at the specified flow rate.
*6 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power
failure.
*7 Rotor blade temperature warning sensor is optional. The function of the rotor blade temperature warning sensor can be
added when ordering the product. Please contact us for details.
*8 The accuracy of the rotor blade temperature warning sensor is the accuracy at the rated speed.
*9 The safety function is activated at rotational speeds above 21,780 rpm. For the safety function of the rotor blade
temperature warning sensor, please refer to "7.1.10 Safety feature of the rotor blade temperature warning sensor
(Option)".
*10 Mass is a value of state that the only standard accessory was installed (except the optional accessory).
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