Edwards STP-iXA4507 Series User Manual

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 89
SERIAL COMMUNICATION PROTOCOL
5
Pump operation mode
Value
Levitation
1
No Levitation
2
Acceleration
3
Normal
4
Deceleration (Brake)
5
Autotest
6
Tuning
7
Tuning Complete
8
[System Reservation]
9, 10, 11
Table 26 - Pump operation mode
Example:
Pump operation mode: 01
hex
= 1 = Levitation
The number of errors: 02
hex
= 2 errors
Error 1: 0D
hex
= 13 = Disturbance Xh
Error 2: 0F
hex
= 15 = Disturbance Xb
Error 3 to 80: 00
hex
= No error detected
Parameter
1
2
3
4
5
6
7
8
9
10
11
ASCII
0
1
0
2
0
D
0
F
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
31
30
32
30
44
30
46
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
12
13
[Omitted]
68
69
70
71
72
73
74
75
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
76
77
78
79
80
81
82
ASCII
0
0
0
0
0
0
0
0
0
0
0
0
0
0
HEX
30
30
30
30
30
30
30
30
30
30
30
30
30
30

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English