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1c. High mag.
An electron beam is more focused than [Middle mag.], achieving high resolution.
Although charge-up phenomenon and damage to samples can be minimized,
contrast or image degradation can occur depending on the observed sample or
magnification. This condition is suitable for observation at a magnification of 6,000x to
30,000x. This magnification is only reference value. Set the advanced value
depending on samples and purpose.
When [High mag.] is selected, the [h] mark is displayed in the information area
located in the lower right part of the image observation area. (see 4.3.2)
Figure 4.2.4-4 Observation Condition Settings (5 kV - High Mag.)
The features of the observation condition of [5kV] are explained below.
Low Mag. Middle Mag. High Mag.
Electron beam focusing Coarse Fine
Image contrast High Low
Image quality Fine Coarse
Charge-up phenomenon High Low
Sample damage High Low
Figure 4.2.4-5 Features of the observation condition [5kV]
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