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Code Error Message Countermeasure
1511 The rotation speed of TMP
does not reach the normal
level.
Check if there is no vacuum
leakage.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
A time-out (300 s) has occurred during
evacuation.
Click the [OK] button to close the message.
Restart the system by the following procedure.
1.
Turn off the PC power.
2.
Turn off the main unit power.
3.
Restart the PC.
4.
Turn on the main unit power and start the
application.
Make sure the specimen stage and the electron
gun are securely closed, and no particles, such
as dust, are trapped.
1512 The vacuum does not reach
the normal level.
Check if there is no vacuum
leakage.
Start up the main unit and
application again.
Contact service if the failure
occurs repeatedly.
A time-out (300 s) has occurred during
evacuation.
Click the [OK] button to close the message.
Restart the system by the following procedure.
1.
Turn off the PC power.
2.
Turn off the main unit power.
3.
Restart the PC.
4.
Turn on the main unit power and start the
application.
One of the following factors has occurred: the
specimen chamber is under 1Pa, the TMP
READY signal is not on, or the required rpm for
the TMP has not been attained. If the same
message appears repeatedly after restart of the
system, contact the nearest service
representative.
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