- v -
5.2 Beam Axis Alignment ............................................................................................ 5- 11
5.3 Condenser Lens Aperture Replacement ................................................................ 5- 21
5.4 Objective Aperture Replacement ........................................................................... 5- 25
5.5 Error Messages ..................................................................................................... 5- 29
5.5.1 Messages Displayed When the Application is Started ................................ 5- 29
5.5.2 Initial Startup Window (During Initialization) ............................................... 5- 31
5.5.3 Normal Observation Screen ...................................................................... 5- 34
5.5.4 Wait Message Window .............................................................................. 5- 51
5.5.5 Termination Process .................................................................................. 5- 53
6 REPLACEMENT PARTS ......................................................................................... 6- 1
6.1 Consumables ........................................................................................................ 6- 1
6.2 Limited Life Parts .................................................................................................. 6- 2
6.3 Spare Parts ........................................................................................................... 6- 4
7 3D-VIEW (Option) ................................................................................................... 7- 1
7.1 Functional Outline ................................................................................................. 7- 1
7.2 Measurement Method of 3D Information ............................................................... 7- 3
7.3 Specifications ........................................................................................................ 7- 5
7.4 Installing and Uninstalling ...................................................................................... 7- 7
7.5 Environment Required for the Operation of 3D-Image Viewer ............................... 7- 7
7.6 Installing 3D-Image Viewer ................................................................................... 7- 8
7.7 Uninstalling 3D-Image Viewer ............................................................................... 7- 11
7.8 3D-Image Viewer Screen Configuration ................................................................ 7- 13
7.9 Menu Functions .................................................................................................... 7- 15
7.10 Image Settings View Function ............................................................................. 7- 23
7.11 Profile Settings View Function ............................................................................. 7- 28
7.12 Mouse Pointer ..................................................................................................... 7- 30
7.13 3D Viewer Functions ............................................................................................ 7- 31
7.14 Operation Procedures .......................................................................................... 7- 33
7.14.1 Procedure of 3D-Image Capture ............................................................. 7- 33
7.15 Displaying a 3D-Image by 3D-Image Viewer........................................................ 7- 39
7.15.1 Launching 3D-Image Viewer .................................................................. 7- 39
7.15.2 Importing Image Data [Import] ................................................................ 7- 40
7.16 Displaying a Profile and Measuring Roughness Parameters ................................ 7- 44
7.16.1 Measurement of Roughness [Line] .........................................................
7- 44
7.1
6.2 Measurement of Roughness [Free] ........................................................ 7- 45
7.16.3 Display of Roughness Parameters ......................................................... 7- 45
7.17 Measurement....................................................................................................... 7- 48