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TM3030 Plus
Hitachi TM3030 Plus User Manual
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First, please read the sections on “
I
MPOR
T
ANT” and “For
t
he Safe Handling of the
System” provided at the beginning of this Instruction Manual.
List of
Abbreviations
Abbreviations that appear frequently in this Instruction Manual and their full spellings are
given below:
PC: Personal
Computer
HV
: Hig
h
V
oltage
DFP: Diaphragm
Pump
TMP
:
Turb
o Mol
ecular Pu
mp
FOV
:
Field of View
3
5
Table of Contents
Preface
3
About this Instruction Manual
3
Important
5
Product Warranty
5
Installation, Relocation, and after Service
7
Workshop and Training for Customers
8
System Life
8
Disposal
8
Miscellaneous
9
For the Safe Handling of the System
14
General Precautions on Safety
16
Warning
16
Caution
16
WARNING and CAUTION Labels on the System
20
Notice
22
About the Power Supply
22
About the Cable Connection
22
About the Detector
22
About Turbo Molecular Pump
23
About Power Outages
23
On the Power Supply for the PC
24
On Data Backup
24
About Application Software
24
About the Computer Virus
25
About Network Connection
26
To Avoid Serious Property Damage or Damage to the System
22
For the Proper Use of the System While Avoiding Minor Damage to It
27
Installing the Control Application
27
Properties of the PC Screen
27
About PC Freezing
27
About the Power Saving Feature and the Screen Saver
27
Precautions on Operating the System
28
About Magnetic Fields Generated by a Notebook Pc
28
About the Temperature and Humidity of the Room
28
Table of Contents
30
Precautions on Handling
36
Precautions on Operating the System
37
Emergency Action
37
Miscellaneous
37
Notice on Disturbance by Electromagnetic Wave
37
Overview
38
Specifications and Installation Conditions
38
Features
39
Specifications
40
Recommended PC Specifications
41
Installation Condition
42
Items to be Prepared
46
Connecting to the PC
47
Installation and Setup
47
Setting up the PC
47
Screen Settings
47
Installation of the Tm3030Plus Application Program
58
Installation of the Application Program
61
Installation of the Instruction Manual
66
Setup of the System Files
71
Confirmation of the Installation
73
Installation of the USB Driver Software
74
Confirmation of the USB Driver Software
75
Setup of the Observation Screen Size
77
Adding a User Account
82
Uninstallation of the Tm3030Plus Application Program
85
Uninstallation of the Application Program
85
Uninstallation of the Instruction Manual
88
Upgrading of the Tm3030Plus Application Program
90
Upgrading of the Application Program
90
Upgrading of the Instruction Manual
103
About Tm3030Plus Setup CD-ROM (Brief Explanation / Summary)
112
Installing the Application
113
Upgrading the Application
114
Output Log Data
115
About Tm3030Plus Application
115
Exit
115
System Configuration
116
Part Names
117
Main Unit
117
Diaphragm Pump
119
Operations
120
Summary of Operations
120
Operation Units
120
Operation Windows
121
Basic Operations
123
Starting the System
124
Loading a Specimen and Adjusting Its Height
127
Changing Specimens
132
Observation Condition Settings
137
Signal Select / Observation Mode Settings
140
Starting Observation
144
Searching for Field of View
145
Setting a Magnification
149
Adjusting the Brightness / Contrast
151
Coarse Focusing
152
Fine Focusing
154
Saving the Image Data
157
Checking the Image Data
160
Terminating the Image Observation
160
Shutting down the System
162
Detailed Description of Functions
164
Image Observation Area
164
Information / Comments Area
164
File Menu
165
Edit Menu
167
View Menu
168
Setting Menu
173
Stage Menu
178
Maintenance Menu
181
Help Menu
182
Start / Stop Button
183
View Mode Selection Button
185
Observation Condition Selection Button
186
Signal Select / Observation Mode Selection Button
189
Quick Save Button
192
Save Button
194
Magnification Button
197
Preset Buttons
198
Brightness Button
199
Contrast Button
201
Auto B/C Button
203
Focus Button
204
Auto Focus Button
205
Image Shift Reset Button
206
Rotation Button
206
Edit Button
208
Minimize Button
214
Exit Button
215
Setting for Save Window
216
Save Image Window
216
Digital Zoom Window
218
Data Entry / Measurement Window
222
Image Balance Window
227
Preset Magnification Window
229
Auto B/C Adjustment Window
230
Control Sensitivity Window
231
Beam Axis Alignment Window
232
Observation Screen Size Window
234
Astigmatism Correction
235
User Information Window
236
Version Information Window
237
Maintenance
238
Filament Replacement
239
Ultrasonic Cleaning with Organic Solvent (Volatile Solvent)
247
Beam Axis Alignment
248
Condenser Lens Aperture Replacement
258
Objective Aperture Replacement
262
Error Messages
266
Messages Displayed When the Application Is Started
266
Initial Startup Window (During Initialization)
268
Normal Observation Screen
271
Wait Message Window
288
Termination Process
290
Consumables
291
Replacement Parts
291
Limited Life Parts
292
Spare Parts
294
Functional Outline
295
VIEW (Option)
295
Measurement Method of 3D Information
297
Specifications
299
Environment Required for the Operation of 3D-Image Viewer
301
Installing and Uninstalling
301
Installing 3D-Image Viewer
302
Uninstalling 3D-Image Viewer
305
Image Viewer Screen Configuration
307
Menu Functions
309
Image Settings View Function
317
Profile Settings View Function
322
Mouse Pointer
324
Viewer Functions
325
Operation Procedures
327
Procedure of 3D-Image Capture
327
Displaying a 3D-Image by 3D-Image Viewer
333
Launching 3D-Image Viewer
333
Importing Image Data [Import]
334
Displaying a Profile and Measuring Roughness Parameters
338
Measurement of Roughness [Line]
338
Measurement of Roughness [Free]
339
Display of Roughness Parameters
339
Measurement
342
Measurement of Distance
342
Measurement on Profile View
344
Fix Function
347
Image Fix 3 Points
347
Image Fix 9 Points
350
Profile Fix
352
Saving
354
Saving 3D Data Being Worked on
354
Image File
355
Saving an Image or Profile on Image View as a CSV Format
355
Conversion into TDV Format
356
Print
357
Model Display in Three Dimensions
360
Calibration of 3D Measurement
365
Setting of Calibration Condition
366
Calibration Operations
369
Calibration of X, y
369
Calibration of Z
371
Calibration of Flat
373
Height Calibration Using a 30-Degree Tilted Specimen Stub
374
Example of Procedure for Flat Calibration by 30-Degree Tilted Specimen
374
Stub
374
Example of Procedure for Z Calibration by 30-Degree Tilted Specimen
377
Appendix
381
APPENDIX 1 Roughness Parameters
381
APPENDIX 2 List of Messages
384
4
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Hitachi TM3030 Plus Specifications
General
Brand
Hitachi
Model
TM3030 Plus
Category
Microscope
Language
English
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