Edwards STP-iXA4507 Series - User Manual

MT-91E-001-0
STP Series Turbomolecular Pumps
STP-iXA4507 Series
Instruction Manual
Copyright 2023 Edwards Japan Limited. All rights reserved. Printed in Japan.
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
2023.10

Edwards STP-iXA4507 Series Specifications

General

Brand	Edwards
Model	STP-iXA4507 Series
Category	Water Pump
Language	English

Summary

Technical Data

STP Pump Specifications

Gas Flow Rates and Cooling Conditions

Provides data on maximum gas flow rates and water cooling requirements.

Installation of the STP Pump

Installation Procedures and Connections

Guides on how to install, connect cables, piping, and specific units like TMS.

Piping and Connections

Details vacuum piping methods and connecting purge and cooling ports.

TMS Unit and Baking Heater

Semiconductor Equipment Integration

Serial Communication Protocol

Connection and Setup Procedures

Details signal connections, RS485 setup, communication parameters, and ports.

Protocol and Transmission Standards

Explains protocol specifications, transmission frames, error control, and data formats.

Command Specifications and List

Lists available commands for pump operation, settings, and reading data.

Safety Functions

Safety Function Overview

Explains safety functions for detecting abnormalities/errors and response mechanisms.

Warning Functions and Settings

Troubleshooting Safety Issues

Provides guidance on troubleshooting failures indicated by LEDs or errors.

Maintenance and Inspection

Cleaning and Deposit Inspection

Overhaul and Replacement Intervals