Edwards STP-iXA4507 Series - Page 123

STP-iXA4507 series Turbomolecular Pump
MT-91E-001-0
Page 113
SERIAL COMMUNICATION PROTOCOL
5
Parameter
4a
4b
4c
4d
ASCII
0
D
0
1
0
7
0
4
3
0
0
6
5
9
*1
*1
*1
*1
*1
*1
HEX
30
44
30
31
30
37
30
34
33
30
30
36
35
39
Parameter
5a
5b
5c
5d
ASCII
1
2
0
1
0
6
1
2
0
1
1
5
0
8
*1
*1
*1
*1
*1
*1
HEX
31
32
30
31
30
36
31
32
30
31
31
35
30
38
Parameter
6a
6b
6c
6d
ASCII
F
F
0
1
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
31
30
30
30
30
30
30
30
30
30
30
Parameter
7a
7b
[Omitted]
21d
ASCII
F
F
0
1
*1
*1
*1
*1
*1
*1
HEX
46
46
30
31
Parameter
22a
22b
22c
22d
ASCII
F
F
0
1
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
31
30
30
30
30
30
30
30
30
30
30
*1 System reservation