Keysight Technologies B1505A

5-26 Keysight B1505A Configuration and Connection Guide
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect High Voltage Bias Tee
Table 5-19 To Connect N1260A Output
Figure 5-9 To Connect N1260A High Voltage Bias-Tee
N1260A terminals Required cables/Description Connect to
Output Low Coaxial cable with SHV(plug) connector. DUT low terminal
(ex: source)
High Coaxial cable with SHV(plug) connector. DUT high terminal
(ex: drain)
AC Guard Coaxial cable with SHV(plug) connector.
This terminal provides the AC guard (circuit common) signal of
MFCMU. For the 3-terminal device measurement, the AC Guard
must be extended to the device terminal which is not connected to
Low or High.
DUT terminal
(ex: gate)
AC Guard
High
Low
Signal
AC Guard/Return
!!
!
Output
㼼3kV Max
䞉䞉䞉䞉
AC Guard
High
Low
Signal
AC Guard/Return
!!
!
Output
㼼3kV Max
䞉䞉䞉䞉
㼼3kV Max
䞉䞉䞉䞉䞉䞉䞉䞉
B1505A
Hcur
MFCMU
N1260A High Voltage Bias-T
HVSMU
Force
N1300A
Hpot
Lpot
Lcur
HVSMU
16493T
High
Low
DUT
AC Guard