Keysight B1505A Configuration and Connection Guide 5-25
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect High Voltage Bias Tee
To Connect High Voltage Bias Tee
Keysight N1260A high voltage bias-tee is used to perform the high voltage C-V
measurement. The C-V measurement of up to 3000 Vdc can be realized by using the
bias-tee, MFCMU, and HVSMU. The N1260A should be installed near your DUT
interface as shown in Table 5-1 on page 5-5. Also see Figure 5-9 for connection example.
The N1260A is also used for the high voltage C-V measurement using the N1265A test
fixture. It must be connected between the MFCMU and the N1265A. Then use two
N1254A-518 SHV cables to connect the N1260A output to the N1265A Bias Tee input.
The N1260A input connection is same as Table 5-18. Ignore Table 5-19.
Table 5-18 To Connect N1260A Input
NOTE Turn the B1505A off before connecting the CMU cable.
Connect HVSMU to obtain DC bias input. Because the bias-tee cannot pass the MFCMU
internal DC bias.
B1505A terminals Required cables N1260A terminals
HVSMU
Force 16493T HVSMU cable, 3 m or 1.5 m From HVSMU
MFCMU Hcur N1300A CMU cable, 3 m or 1.5 m
It is not needed to connect the ground wire extended from the
CMU cable.
From
MFCMU
Hcur
Hpot Hpot
Lpot Lpot
Lcur Lcur
From HVSMU
Hcur
Hpot
Lpot
Lcur
From MFCMU
㼼3kV Max
䞉䞉䞉䞉
㼼3kV Max
䞉䞉䞉䞉䞉䞉䞉䞉
!!