Keysight B1505A Configuration and Connection Guide 7-51
Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
3 kV, 20 A, Capacitance Measurement for On-Wafer Vertical
Device
• Device Type: Vertical MOSFET (4 terminals)
• Key Specification
• Max voltage/current: 3 kV/20 A
• Capacitance measurement up to 3 kV DC bias
• Module Selector for multi-parameter automated measurement function
Figure 7-26 Connection example for IV measurement
HVSMU
HCSMU
GNDU
MCSMU
B1505A
16493L (Included in B1505A )
N1258A
D (Chuck)
G
S
HCSMU Non-
Kelvin adapter
1649 3S-0 11
HF
LF
For Gat e
For Drain
For Drain
16493G-001 Digital I/O cable (Included in N1258A)
N1254A-104 TRX(J) to BNC(P) adapter
F
S
F
S
HVSMU
HCS MU F
GNDU
16493J Interlock cable (Included in B1505A)
N1260A
Bi as-T
AC-H
AC-L
AC-Guard
Hc
Hp
Lc
Lp
MFCMU
HCS MU S
N1300A (Included in MFCMU)
16494A (Included in the MCSMU)
16494A-003
16493U-001
1250-2405
16493T (Included in the HVSMU. Please change connecƟon manually)
16493S (Included in the HCSMU)
R-Box
1kohm
N1262A-010
High F
High S
Low S
Low F
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