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7-40 Keysight B1505A Configuration and Connection Guide

Connection and Ordering Examples

Configuration Examples for Lateral Device Measurement with Wafer Prober

3 kV, 500 A, Capacitance Measurement for On-Wafer

Lateral Device

• Device Type: Lateral MOSFET (4 terminals)

• Key Specification

• Max voltage/current: 3 kV/500 A

• Capacitance measurement up to 3 kV DC bias

• Module Selector for multi-parameter automated measurement function

Figure 7-21 Connection example for CV measurement

NOTE The connection diagram in Figure 7-16 shows Cds measurement.

NOTE For IV measurement connection diagram, please refer to Figure 7-20.

NOTE Prober vendor is responsible for cabling inside the shielding box.

Table 7-19 Ordering example

Model/Option Quantity Description

B1505A 1 Power Device Analyzer/Curve Tracer mainframe

B1513C-FG 1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)

B1514A-FG 4 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)

B1520A-FG 1 Multi Frequency Capacitance Measurement Unit Module

16494J I nterlock (Included in B1505A)

16493G-001 Digital I/O cable (Included in N1265A)

HVSMU

GNDU

MCSMU

B1505A

MCSMU

HVSM U

GND U

Gate F

Gate S

UHC Input

V Control

I Control

For Gate

For UHC

For UH C

For Drain

N1265A

MCSMU

Chuck

For Chuck

N1260A

Bias-T

To change connecƟon

manually

HV-F AC-H

AC-L

AC-Guard

MFCMU

N1300A (Included in the MFCMU)

N1254A-518

16494T (Included in the HVSMU)

16493L (Included in B1505A)

16494A

(Included in the MCSMU)

HCSMU N on-

Kelvin adapter

16493S-011

N1254A-104 TRX(J) to BNC(P) adapter

16493U-001

Brand	Keysight Technologies
Model	B1505A
Category	Measuring Instruments
Language	English

Keysight Technologies B1505A Configuration Guide

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