Keysight B1505A Configuration and Connection Guide 7-33
Connection and Ordering Examples
Configuration Examples for Lateral Device Measurement with Wafer Prober
Add High Resolution Measurement (10 fA resolution with
MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance
Measurement for On-Wafer Lateral Device
• Device Type: Lateral MOSFET (4 terminals)
• Key Specification
• Max voltage/current: 3 kV/20 A
• Drain leakage current down to 10 fA
• Module Selector for multi-parameter automated measurement function
Figure 7-17 Connection example
NOTE Prober vendor is responsible for cabling inside the shielding box.
Table 7-16 Required equipment, accessories, and cables
Model/Option Quantity Description
B1505A 1 Power Device Analyzer/Curve Tracer mainframe
B1511B-FG 2 Medium Power Source/Monitor Unit module (100 V/ 100 mA)
B1512A-FG 1 High Current Source Monitor Unit, 20 A/20 V(Pulsed); 1 A/40 V(DC)
B1513C-FG 1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)
B1514A-FG 1 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed); 100 mA/30 V(DC)
16493T 1 High Voltage Source Monitor Unit Cable
HVSMU
HCSMU
GNDU
MCSMU
B1505A
N1258A
MPSMU
ProtecÆŸon
Adapter
N1261A-003
Chuck
D
G
S
HCSMU Non-
Kelvin adapter
16493S-011
HF
LF
For Gate
16493G-001 Digital I/O cable (Included in N1258A)
N1254A-104 TRX(J) to BNC(P) adapter
F
S
F
S
F
S
High F
High S
Low S
Low F
Digital I/O
HV SM U
HCSMU F
HCSMU S
GNDU
16493J Interlock cable (Included in B1505A)
For Chuck
For Drain
For Drain
16493T (Included in the HVSMU)
16493S (Included in the HCSMU)
16494A
(Included in the MCSMU)
16493L (Included in B1505A)
16493U-001
1250-2405
16494A-003
16494A
(Included in the MPSMU)
16494T
R-Box
1kO
N1262A-010
MPSMU
For Drain
HPSMU F
HPSMU S
16494A (Included in the MPSMU)
F
S
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