Keysight Technologies B1505A

7-56 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
3 kV, 40 A Measurement for On-Wafer Vertical Device
• Device Type: Vertical MOSFET (3 terminals)
• Key Specification
• Max voltage/current: 3 kV/30 A with Module Selector, 3 kV/40 A without Module
Selector
• Module Selector for multi-parameter automated measurement function
Figure 7-29 Connection example for 3kV, 30A measurement with a N1258A Module Selector
HCSMU
Dual HCSMU
CombinaƟon
adapter
16493S-021
HVSMU
HCSMU
GNDU
MCSMU
B1505A
N1258A
G
S
HCSMU Non-
Kelvin adapter
16493S-011
HF
LF
R-Box
1kohm
N1262A-010
For Gate
For Dr ain
For Dr ain
16493G-001 Digital I/O cable (Included in N1258A)
N1254A-104 TRX(J) to BNC(P) adapter
F
S
F
S
High F
High S
Low S
Low F
Digital I/O
HV SM U
HCSMU F
HCSMU S
GNDU
F
SFor Drain
16493J Interlock cable (Included in B1505A)
D (Chuck)
16493T (Included in the HVSMU)
16493S (Included in the HCSMU)
16493L (Included in B1505A)
16493S (Included in the HCSMU)
16494A (Included in the MCSMU)
16494A-003
30 c m H CS MU ca ble
(Included in 16493S-021)
16493U-001
1250-2405