7-60 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
3 kV, 500 A, Capacitance Measurement for On-Wafer
Vertical Device
• Device Type: Vertical Device (3 terminals)
• Key Specification
• Max voltage/current: 3 kV/500 A
• Capacitance measurement up to 3 kV DC bias
• Module Selector for multi-parameter automated measurement function
Figure 7-32 Connection example for CV measurement
NOTE Prober vendor is responsible for cabling inside the shielding box.
NOTE Please refer to Figure 7-31 for IV measurement connection example.
NOTE In this configuration example, a High Voltage Triaxial jack connector is used to connect the
wafer chuck. Then you need a adapter to connect the High Voltage Triaxial plug connector
to the SHV connector. Assemble it by using the N1262A-021 connector or consult your
prober vendor.
16494J Interlock cable (Included in B1505A)
16493G-001 Digital I/O cable (Included in N1266A)
G
S
HVSMU
GNDU
MCSMU
B1505A
MCSMU
MCSMU
F
S
F
S
F
S
HVSM U
GNDU
Gate F
Gate S
UHC Input
V Control
I Control
For Gate
For UHC
For UH C
For Drain
N1265A
N1260A
Bias-T
To change connecƟon
manually
Hc
Hp
Lc
Lp
HV-F AC-H
AC-L
AC-Guard
MFCMU
D (Chuck)
N1254A-518
N1300A (Included in the MFCMU)
16494A (Included in the MCSMU)
16493L (Included in B1505A)
16493T (Included in the HVSMU)
N1262A-021 can be used for
custom adapter (SHV jack to
HVTRX jack)
Universal
R-Box
N1262A-021
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