7-30 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Lateral Device Measurement with Wafer Prober
3 kV, 20 A, Capacitance Measurement for On-Wafer Lateral
Device
• Device Type: Lateral MOSFET (4 terminals)
• Key Specification
• Max Voltage/Current: 3 kV/30 A with Module Selector, 3 kV/40 A without Module
Selector
• Capacitance measurement up to 3 kV DC bias
• Module Selector for multi-parameter automated measurement function
Figure 7-15 Connection example for IV measurement
HVSMU
HCSMU
GNDU
MCSMU
B1505A
16493L (Included in B1505A )
N1258A
MPSMU
ProtecƟon
Adapter
N1261A-003
Chuck
D
G
S
HCSMU Non-
Kelvin adapter
16493S-011
HF
LF
R-Box
1kohm
N1262A-010
For Gate
For Drain
For Drain
16493G-001 Digital I/O cable (Included in N1258A)
N1254A-104 TRX(J) to BNC(P) adapter
F
S
F
S
F
S
HV SMU
HCSMU F
GNDU
16493J Interlock cable (Included in B1505A)
For Chuck
N1260A
Bias-T
AC-H
AC-L
AC-Guard
Hc
Hp
Lc
Lp
To change connecƟon
manually
MFCMU
N1300A (Included in the MFCMU)
16493T (Included in the HVSMU)
16493S(Included in the HCSMU)
16494A (Included in the MCSMU)
16494A
(Included in the MPSMU)
16493T
16493U-001
1250-2405
HCSMU S
16494A-003
Low F
High F
High S
Low S
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