Keysight B1505A Configuration and Connection Guide 7-25
Connection and Ordering Examples
Configuration Examples for Lateral Device Measurement with Wafer Prober
Configuration Examples for Lateral Device
Measurement with Wafer Prober
This section introduces typical configuration examples for lateral device measurement with
wafer prober shown in Table 7-12.
Table 7-12 Configuration examples
Device Max V Max I HVMC C-V
Add
MPSMU
Note
Lateral 4
terminal
on-wafer
device
3 kV 20 A "3 kV, 20 A Measurement for
On-Wafer Lateral Device" on page
7-26
3 kV 20 A YES "3 kV, 20 A, Capacitance Measurement
for On-Wafer Lateral Device" on page
7-30
3 kV 20 A YES "Add High Resolution Measurement
(10 fA resolution with MPSMU or
HPSMU) Capability to 3 kV, 20 A,
Capacitance Measurement for
On-Wafer Lateral Device" on page
7-33
3 kV 40 A "3 kV, 40 A Measurement for
On-Wafer Lateral Device" on page
7-35
3 kV 500 A "3 kV, 500 A Measurement for
On-Wafer Lateral Device" on page
7-38
3 kV 500 A YES "3 kV, 500 A, Capacitance
Measurement for On-Wafer Lateral
Device" on page 7-40
3 kV 500 A YES "3 kV, 500 A, High Voltage Medium
Current Measurement for On-Wafer
Lateral Device" on page 7-42
10 kV 500 A "10 kV, 500 A Measurement for
On-Wafer Lateral Device" on page
7-44