7-42 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Lateral Device Measurement with Wafer Prober
3 kV, 500 A, High Voltage Medium Current Measurement for
On-Wafer Lateral Device
• Device Type: Lateral MOSFET (4 terminals)
• Key Specification
• Max voltage/current: 3 kV/500 A
• High Voltage Medium Current capability: 2200 V/1.1 A, 1500 V/2.5 A
• Module Selector for multi-parameter automated measurement function
Figure 7-22 Connection example
NOTE Prober vendor is responsible for cabling inside the shielding box.
Table 7-20 Ordering example
Model/Option Quantity Description
B1505A 1 Power Device Analyzer/Curve Tracer mainframe
B1513C-FG 1 High Voltage Source Monitor Unit, 3000 V/4 mA (Pulsed & DC)
B1514A-FG 6 Medium Current Source Monitor Unit, 1 A/30 V(Pulsed), 100 mA/30 V(DC)
16493T 1 High Voltage Source Monitor Unit Cable
16493T-001 or
002
1 High Voltage Source Monitor Unit Cable (1.5 m or 3.0 m)
16493L 1 Ground Unit Cable
D
G
S
N1266A
HVSMU
GNDU
MCSMU
MCSMU
MCSMU
B1505A
MCSMU
MCSMU
16493J Interlock cable (Included in B1505A)
GNDU
Input O utput
Input
HVSMU
Output
High
Output
Low
F
S
F
S
F
S
VcontrolF
Vcontrol S
Icontrol F
Icontrol S
F
S
F
S
16493G-001Digital I/O cable (Included in N1266A)
HVSM U
GND U
UHC I nput
V Control
I Control
For Gate
For N126 5A
For N126 5A
For Dr ain
For N126 6A
For N126 6A
HF
LF
HS
LS
G
ate
N1265A
Gate
Se le ctor
High
Low
MCSMU
F
S
N1254A-524
16493G-001 Digital I/O cable (Included in N1265A)
Chuck
For Ch uc k
Gate F
Gate S
16493L
16493T (Included in the HVSMU)
16494A (Included in the MCSMU)
16493L
(Included in B1505A)
16494A
(Included in the MCSMU)
16493T
16494A (Included in the MCSMU)
HCSMU Non-
Kelvin adapter
16493S-011
N1254A-104 TRX(J) to BNC(P) adapter
16493U-001
16493U-001
16493U-001