Keysight B1505A Configuration and Connection Guide 5-23
Connection Guide for Wafer Prober and Your Own Test Fixture
To Connect Protection Adapter
To Connect Protection Adapter
Keysight N1261A protection adapter is used to protect GNDU or HP/MPSMU module
from high voltage. The N1261A should be installed near your DUT interface as shown in
Table 5-1 on page 5-5.
The N1261A-001 is also used for the measurement using the N1265A test fixture. It must
be connected between the HP/MPSMU and the N1265A SMU input. Then use four
16494A triaxial cables for Kelvin connection or two 16494A cables for non-Kelvin
connection. Recommended cable length is 1.5 m. Ignore Table 5-17.
N1261A-001: HPSMU protection adapter, Triaxial(f)-Triaxial(f)
N1261A-002: GNDU protection adapter, Triaxial(f)-BNC(f)
N1261A-003: HPSMU protection adapter, Triaxial(f)-HV(jack)
N1261A-004: GNDU protection adapter, Triaxial(f)-SHV(jack)
Table 5-16 To Connect N1261A Input
NOTE For connecting HP/MPSMU, use either 16494A or 16493K. But the 16493K cannot be
used for connecting the N1265A.
B1505A terminals Required cables N1261A terminals
HPSMU
or
MPSMU
Force 16494A Triaxial cable, 3 m or 1.5 m, 1 ea., for the non-Kelvin
connection, connect it between the Force connectors.
For the Kelvin connection, prepare additional one more cable and
connect it between the Sense connectors. Or use 16493K Kelvin
triaxial cable instead of 16494A.
From
HPSMU
Force
Sense Sense
GNDU 16493L GNDU cable, 3 m or 1.5 m From GNDU
N1261A
Opt 001
HPSM U Protection Adapter
Force
Sense
From
HPSMU
Output
Guard
Sense/
Force
Circuit
Common
!
Force
㼼200V max
䞉䞉䞉䞉
Sense
㼼200V max
䞉䞉䞉䞉
Agilent
Inp ut
Peak 㼼3kV=max
N1261A
Opt 001
HPSM U Protection Adapter
Force
Sense
From
HPSMU
Output
Guard
Sense/
Force
Circuit
Common
!
Guard
Sense/
Force
Circuit
Common
!!
Force
㼼200V max
䞉䞉䞉䞉
Force
㼼200V max
䞉䞉䞉䞉
㼼200V max
䞉䞉䞉䞉䞉䞉䞉䞉
Sense
㼼200V max
䞉䞉䞉䞉
Sense
㼼200V max
䞉䞉䞉䞉
㼼200V max
䞉䞉䞉䞉䞉䞉䞉䞉
Agilent
Inp ut
Peak 㼼3kV=max
N1261A
Opt 002
GNDU Protection Adapter
From GNDU
Output
Force
Sense
Agilent
Force
Sense
Circuit
Common
Sense/
Force
Circuit
Common
㼼40 V m ax
䞉䞉䞉
Inp ut
Peak 3kV=max
N1261A
Opt 002
GNDU Protection Adapter
From GNDU
Output
Force
Sense
Agilent
Force
Sense
Circuit
Common
Force
Sense
Circuit
Common
Sense/
Force
Circuit
Common
Sense/
Force
Circuit
Common
㼼40 V m ax
䞉䞉䞉
㼼40 V m ax
䞉䞉䞉䞉䞉䞉
Inp ut
Peak 3kV=max