7-54 Keysight B1505A Configuration and Connection Guide
Connection and Ordering Examples
Configuration Examples for Vertical Device Measurement with Wafer Prober
Add High Resolution Measurement (10 fA resolution with
MPSMU or HPSMU) Capability to 3 kV, 20 A, Capacitance
Measurement for On-Wafer Vertical Device
• Device Type: Vertical MOSFET (3 terminals)
• Key Specification
• Max voltage/current: 3 kV/20 A
• Drain leakage current down to 10 fA
• Module Selector for multi-parameter automated measurement function
Figure 7-28 Connection example
NOTE Prober vendor is responsible for cabling inside the shielding box.
HVSMU
HCSMU
GNDU
MCSMU
B1505A
N1258A
G
S
HCSMU Non-
Kelvin adapter
16493S-011
For Gate
16493G-001 Digital I/O cable (Included in N1258A)
N1254A-104 TRX(J) to BNC(P) adapter
F
S
F
S
High F
High S
Low S
Low F
Digital I/O
HV SM U
HCSMU F
HCSMU S
GNDU
16493J-001 Interlock cable
D(Chuck)
For Drain
For Drain
16493T (Included in the HVSMU)
16493S (Included in the HCSMU)
16494A (Included in the MCSMU)
16493L (Included in B1505A)
16493U-001
1250-2405
16494A-003
R-Box
1kO
N1262A-010
MPSMU
For Drain
HPSMU F
HPSMU S
16494A (Included in the MPSMU)
F
S
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