Comet Synertia RF - Abbreviations and Special Terms; Table 1: Abbreviations; Table 2: Special Terms

User Manual Synertia® RF Generator 3
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
1.1.3 Abbreviations and special terms
The following special terms and abbreviations may appear on the Synertia® RF generator
or in this manual.
DC Direct current
DPDT Dual Pole Dual Throw
FPGA Field programmable gate array
LOTO
Lockout and tagout
PLL Phase lock loop
QSPI Quad serial peripheral system
RF
Radio frequency
RPU0 or 1 Realtime processing unit zero or one
RTOS Realtime operating system
VCO
Voltage controlled oscillator
Table 1: Abbreviations
Arc During plasma processes, e. g. sputtering processes with which layers of
material are deposited on a substrate, localized discharges can occur.
These discharges are called arcs.
CEX CEX means “Common Exciter“-architecture, wherein a unit can be a
initiator generator or be a unit receiving from an initiator.
CEX allows a Synertia® RF generator to operate in a initiator-receiver
configuration with multiple generators.
Interlock chain
Control circuit with several switches connected in series.
When the interlock chain is open, RF power operation is disabled.
Matching network Matching network product providing for optimum adaptation
of the load impedance towards the RF generator.
Table 2: Special terms