Comet Synertia RF - Equipment Safety; Responsibility of the Operator; Limiting Conditions; Table 6: Limiting Conditions

User Manual Synertia® RF Generator 19
The information contained in this manual is subject to change by Comet Yxlon without prior notice.
1.6 Equipment safety
1.6.1 Responsibility of the operator
The generator is designed to fulfil the applicable EC directives, in particular the EMC
directive with its limits for radiated emission according to EN 55011.
The operator is responsible for the conformity with the applicable laws at the workplace.
As a result of integrating the generator into an industrial installation, e. g. a plasma
processing tool, changes might be caused which can only be verified by specific on-site
measurements. The execution of such measurements is the responsibility of the
manufacturer or the operator of the industrial installation.
1.6.2 Limiting conditions
Limit
Unit Response and User Resolution
RF
Power Limit
When the
Synertia® RF generator reaches the forward or reflected power limit, the
unit reduces forward power to remain within the limits and switches on the “Power
Limit” LED.
RF Output is not at user defined set point. If a reduction of forward
power is not sufficient to make the refle
cted power fall below its maximum
specified value, e.
g. in a system with multiple RF sources where RF power is fed
back through the system, it shuts off RF
power and switches on the “General
Alarm” LED. RF power does not return without user action.
Over
Temperature
When the
Synertia® RF generator exceeds the specified maximum internal
operating temperature, it shuts off RF
power, and switches on the corresponding
LED. RF power does not return without user action.
DC Limit
When the voltage or current exceeds the limit of the internal SMPS (switch mode
power supply), the unit reduces forward power to remain within the limits and
switches on the “Power Limit” LED. RF Output is not at user defined set point.
AC Limit
When the AC mains voltage is too low, the unit reduces forward power to remain
within the limits and switches on the “Power Limit” LED.
RF Output is not at user
defined set point.
External
Pulse Signal
When an external pulse signal exceeds the lower
specified duration, the generator
automatically lengthens this pulse signal internally. The minimum RF
output
duration is identical to the minimum external pulse duration.
This will result in a warning.
Table 6: Limiting conditions